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PECVD Wafer Boat Upgrade

centrotherm is continuously increasing the wafer boat capacity for highest throughput at best cell performance. With minimum effort centrotherm can upgrade your existing installed PECVD system to state-of-the-art batch size to considerably increase capacity per process cycle.
To achieve this, the rear flange of the process tubes, HF lances and handling components have to be replaced.
Moreover, centrotherm technicians will be at your disposal to optimize the quality and cycle time of the PECVD process.


  • Improve your competitive standing
  • Reduction of your per wafer production costs
  • Increased throughput and yield
  • Optimized equipment capacity utilization
  • Optimized process configuration and time