Production Equipment

Batch-type system for R&D solar cell processing

Batch-type system for R&D c-Si solar cell applications

    Processes

    • Atmospheric
      Diffusion | Oxidation | Sintering | Annealing
    • Low Pressure
      Oxide | Nitride | Oxinitride
    • LPCVD
      Polysilicon | Siliziumnitride | Oxide | Oxinitride
R&D System Diffusion Oxidation CVD Processes: c.LAB