E1200: Horizontal Wafer Process System System

Horizontal furnace system for R&D and small-scale production

The c.E1200 small batch laboratory system supports the multiple process capability needs of a low volume production with high process performance.

The centrotherm design is outstanding for high performance, small footprint and low cost of ownerhip while offering a high process flexibility required for multiple applications.


  • Atmospheric, PECVD and LPCVD processes
  • Process selectable chamber options available
  • Flatzone 300mm
  • Advanced water cooling system guarantees no thermal interference between different process tubes
  • Modular component design for ease of installation and start up in clean room facilities


  • Annealing
  • Diffusion
  • Oxidation


  • Fast-Cool-System
  • Integrated lift for automated boat handling
  • Integrated boat buffering and cooling system
  • Fully automated Wafer-Transfer-System with Cassette-to-Cassette Handling